Have you read Application Note 126 from Dallas/Maxim?
Three choices
1) Disable all interrupts during delay. A heavy penalty in embedded software that interrupt intensive.
2) Use timer interrupt, make it highest priority, to meet the timing. For 6us, 9us and 10us delays use method 1.
3) Use hardware, CPLD or 8051(eg. DS80C400) that can suppport 1-wire
peripheral.

Good luck